Unit Price |
Unstated |
Number of Units |
1 |
Manufacturer | Temescal |
Model | BJD 1800 |
Description | E Beam Evaporator, 10" Crucible |
Vacuum System | Cryo Pumped |
Load Lock Included | No |
E Beam Power Supply |  |
Power Supply Type | Solid State |
High Voltage Minimum | 3 kV |
High Voltage Maximum | 10 kV |
Process Control Voltage Minimum | 0 Volts DC |
Process Control Voltage Maximum | 10 Volts DC |
Number of Guns Controlled | 1 |
Lateral/Longitudinal Beam Sweep | Temescal |
Electron Source Type | Six Pocket |
Crucible Size | 10.00 cc (0.61 cu in) |
Vacuum System | CTI Onboard 8 cryopump CTI 8011 Controller CTI Compressor 1020R |
Film Thickness Monitor | Yes |
Residual Gas Analyzer | Yes |
Accessories | Leybold TSP-TH100 RGA |
Other Information | Chamber:
- 18" Dia., water cooled
- Dual crystal sensor
- TP 8-18 Substrate fixtrue
- Single dome configured for (10)3" Wafers and (7) 2" Wafers
Control console:
- Fanuc system computer
- Granville Philips 360 Gauge controller
- Leybold IC/5 Deposition control
- Temescal programmable sweep control
- Edwards Hi vac control
- MC-4C Planetary motor control
- SIMBA 2 power supply
- Temescal gun control
|
Power Requirements | 208 V
100.0 A
50/60 Hz
3 Phase
|
Condition | Very Good |
Exterior Dimensions |  |
Width | 56.000 in (142.2 cm) |
Depth | 34.000 in (86.4 cm) |
Height | 41.000 in (104.1 cm) |