Unit Price |
$ 1,700.00 (each) |
Number of Units |
4 |
Manufacturer | Varian |
Model | M6 |
Inlet Flange | ASA
203.2 mm (8.000 in)
|
Foreline Flange | Other
38.1 mm (1.500 in)
|
Pumping Speed Helium | 1,800.00 l/s (3,814.37 CFM) |
Pumping Speed Air | 1,500.00 l/s (3,178.64 CFM) |
Ultimate Pressure |
5.00E-8(En) torr (6.67E-8 mbar) |
Warmup Time | 12 Minutes |
Cooldown Time | 20 Minutes |
Fluid Charge | 0.40 L (0.11 gal, 0.09 Br gal) |
Cooling Water Required | Minimum Flow: 0.20 GPM (0.76 l/m)
Minimum Temperature: 16 ºC (61 ºF, 289.00 ºK)
Maximum Temperature: 27 ºC (81 ºF, 300 ºK)
|
Water Connection | 1/8" NPT |
Other Information | OD: 11" ID: 7.88" Bolt circle: 9.5" X 8 bolts O Ring groove: 8.25"(Parker 2-267) Foreline Flange: Straight Pipe 1.5" I.D. |
Power Requirements | 208 V
50/60 Hz
1 Phase
|
Exterior Dimensions |  |
Width | 16.000 in (40.6 cm) |
Height | 18.750 in (47.6 cm) |
Weight | 36 lb (16 kg) |